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Photonic MEMS Tunable Lasers
1-Feb-2007 14:29 14:29
Age: 13 yrs


Photonic MEMS Tunable Lasers

Photonic MEMS Tunable Lasers

Ai-Qun LIU

School of Electrical & Electronic Engineering

Nanyang Technological University, 50 Nanyang Avenue

Singapore 639798

(Tel 65-6790-4336, Fax 65-6793-3318, Email

In the past twenty years, the applications of Microelectromechanical Systems (MEMS) technology to the fabrication of mechanical devices greatly stimulated extensive research in semiconductor microsensors and microactuators. MEMS technologies have the advantage of batch processing to address the manufacturing and performance requirements of the sensor industry. In recent research of photonic MEMS and four different type of tunable lasers, which are discussed and experimental results are highlighted in this paper.

This talk is introduce design and fabrication of photonic MEMS technologies from the viewpoint of optics and photonics physics to applications in different types of tunable lasers related to fiber optics communication, which different types of photonic MEMS lasers include MEMS tunable laser, tunable coupling cavity laser, tunable dual-wavelength laser and injection-locked laser. Specific specifications of the four different types of tunable laser with experimental results are discussed relevant with potential applications of fiber optical communications and biophotonic chip. This paper is concluded with the future trends and research directions in photonic MEMS and MEMS tunable with photonic integrated circuit from the viewpoint of physicists and MEMS engineers.

Dr Ai-Qun Liu (A. Q. Liu) received his PhD degree from National University of Singapore (NUS) in 1994. His MSc degree was from Beijing University of Posts & Telecommunications 1988 and BEng degree was from Xi’an Jiaotong University in and 1982. Currently, he is an Associate Professor at the Division of Microelectronics, School of Electrical & Electronic Engineering, Nanyang Technological University (NTU). He is also appointed as an Associate Editor for the IEEE Sensor Journal and Gust Editor for Special Issue of Sensors & Actuators A.  Dr Liu’s major research interests are MEMS design, simulation, fabrication and experiment.



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